课程名称：微系统及智能传感器（Micro-electro-mechanical systems (MEMS): sensors, actuator and microfluidics）
授课人：Richard Yongqing Fu
Micro Electro Mechanical Systems (MEMS) are miniature devices that are widely used in consumer products such as accelerometers used in cars to activate the airbags and in smart phones to flip images and play video games. The field of Microelectromechanical Systems/Nanotechnology (MEMS/Nano) studies the integration of science, engineering, and technology in the length scale of micrometers and nanometers.
This course will introduce the basics of MEMS design, fabrication, sensing and actuation mechanisms, characterization and reliability testing. The MEMS concepts are reinforced through car industry applications that involve design and simulation of MEMS devices using an advanced MEMS tool and testing of actual MEMS devices.
The student will gain a basic understanding of current Micro Electro Mechanical Systems (MEMS) technology and industrial instrumentation systems, with particular emphasis on smart sensors and actuators. The course introduces the fundamental of measurement systems and focuses in particular on MEMS fabrication, MEMS transducer types and applications.
Required Course in Advance: Solid State Physics, Materials Physics, College Physics, Semiconductor Physics.
Richard (YongQing) Fu is a professor in the Faculty of Engineering and Environment, University of Northumbria at Newcastle, UK. He has extensive experience in smart thin film/materials, biomedical microdevices, energy materials, lab-on-chip, micromechanics, MEMS, nanotechnology, sensors and microfluidics. He has established a worldwide reputation from his pioneer research work on shape memory films, piezoelectric thin films, nanostructured composite/films for applications in MEMS, sensing and renewable energy applications.